Gaya APA

Wolf, S., Tauber, R, N. (2000). Silicon processing for the VLSI Era volume 3 / Stanley Wolf, Richard N. Tauber (Vol. 2 (Process technology)). California: Lattice Press.

Gaya MLA

Wolf, Stanley., Tauber, Richard, N.. "Silicon processing for the VLSI Era volume 3 / Stanley Wolf, Richard N. Tauber". Vol. 2 (Process technology) California: Lattice Press, 2000. .